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Lithography Equipment Engineer

Lumentum Holdings

NC- Greensboro, USFull time
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Posted July 8, 2026

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Job Summary

Lumentum is seeking a Lithography Equipment Engineer to support high-volume manufacturing of advanced photonic and optoelectronic devices. This role focuses on sustaining and improving lithography equipment used in the fabrication of III-V semiconductor devices, lasers, and optical components. The engineer will ensure tool performance, process stability, and yield optimization in a fast-paced, precision-driven environment.

Key Responsibilities

Equipment Ownership & Sustaining

  • Serve as the primary owner for lithography tools, including steppers/aligners and coat/develop track systems.
  • Maintain high tool uptime and reliability to support production of photonic devices (e.g., lasers, modulators, optical chips).
  • Perform advanced troubleshooting on optical exposure systems, alignment modules, and resist processing equipment.

Process & Device Support

  • Partner with process and device engineers to support fabrication of III-V photonics devices.
  • Optimize lithography performance for critical parameters such as:
    • Linewidth (CD) control
    • Overlay accuracy
    • Defectivity reduction
  • Support new product introductions (NPI) and technology transfers.

Continuous Improvement

  • Drive initiatives to improve yield, tool throughput, and cost efficiency.
  • Lead projects to reduce variation and improve pattern fidelity for optical device structures.
  • Implement equipment upgrades, recipe improvements, and automation enhancements.

Installation & Qualification

  • Support installation, bring-up, and qualification of new lithography tools and upgrades.
  • Collaborate with OEM vendors (e.g., ASML, Canon, Nikon, TEL) on tool performance and issue resolution.
  • Execute tool matching and cross-fab standardization where applicable.

Preventive Maintenance & Calibration

  • Develop and refine PM procedures to ensure tool precision and stability.
  • Ensure proper calibration of optical systems, alignment stages, and exposure settings.
  • Maintain compliance with cleanroom and EHS standards.

Data Analysis & Problem Solving

  • Analyze SPC data, fault logs, and yield metrics to identify trends and root causes.
  • Use structured problem-solving tools (RCA, 8D, DOE) to resolve recurring issues.
  • Leverage data analysis tools (JMP, Python, Excel) to drive decision-making.

Cross-functional Collaboration

  • Work closely with process engineering, quality, manufacturing, and maintenance teams.
  • Support cross-functional yield improvement initiatives and failure analysis efforts.

Required Qualifications

  • Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Materials Science, Physics, or related field.
  • 3–8+ years of experience in semiconductor or photonics manufacturing.
  • Hands-on experience with lithography equipment (steppers, scanners, track systems).
  • Strong understanding of photolithography fundamentals, including resist processing, alignment, and exposure.
  • Experience working in a cleanroom environment.

Preferred Qualifications

  • Experience in III-V semiconductor or photonics device fabrication (e.g., lasers, VCSELs, optical components).
  • Familiarity with compound semiconductor processes (InP, GaAs).
  • Experience with advanced optical alignment and precision patterning.
  • Knowledge of optical metrology, CD-SEM, overlay, and defect inspection tools.
  • Experience with high-mix, high-precision manufacturing environments.
  • Programming/analysis skills (Python, JMP, MATLAB).

Key Skills & Competencies

  • Strong analytical and troubleshooting capability in precision equipment
  • Attention to detail in high-sensitivity optical processes
  • Ability to work in a high-mix, fast-paced production environment
  • Effective communication across engineering and manufacturing teams
  • Continuous improvement mindset with focus on yield and quality

Work Environment

  • Semiconductor cleanroom environment supporting photonics device manufacturing
  • Requires strict adherence to contamination control and safety procedures
  • May include occasional off-hours or on-call support for critical tools

We are an equal opportunity employer and value diversity at our company.

We do not discriminate on the basis of race, religion, color, national origin, sex, gender, gender expression, sexual orientation, age, marital status, veteran status, or disability status.

We will ensure that individuals with disabilities are provided reasonable accommodation to participate in the job application or interview process, to perform essential job functions, and to receive other benefits and privileges of employment.

Please contact us to request accommodation.

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